| Series / Model No. | Application | Feature / Type | |
|---|---|---|---|
| Wafer alignment | LED thru-beam type | |
| Series / Model No. | Application | Feature / Type | |
|---|---|---|---|
| Safety Liquid Leak Sensor [Control Category 4 PLe SIL3] SQ4
| Liquid leak detection | For safety / Amplifier built-in |
| Amplifier built-in Agent, such as Sulfuric acid Hydrochlonic acid etc., detection type | ||
| Liquid level detection | Amplifier Built-in Pipe-mountable type | |
| Water detection | Thru-beam type | |
| Series / Model No. | Description | Sensing range | |
|---|---|---|---|
| Amplifier built-in | 10 ±3mm 0.394 ±0.118 in | |
| Fiber sensor | 5 to 40mm 0.197 to 1.575 in | |
| Series / Model No. | Application | Feature / Type | |
|---|---|---|---|
| Using AGV in malfunction sensing | Obstacle detection sensor | |
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