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Basic Information
With the case and fiber sheath made of PFA, the fiber can be used with various types of chemical liquids.
Features
Chemical resistant fibers (Reflective type)
<Full-protection type>
FD-S60Y
Metal-free design
Since no metal components are used, there is no need to worry about metal contamination, even if the protective tube is damaged. It is ideal for use in applications such as semiconductor front-end equipment where a clean environment is required.
Detection in long range and narrow view
A built-in lens achieves narrow-view detection with an aperture angle of 30 degrees.
Improved tip flexibility
The protective tube features a bending radius of R30 mm R1.181 in, which improved the cable arrangement compared to previous (R40 mm R1.575 in) designs.
Easy-to-cut protective tube A dedicated fiber cutter is included which is designed to cut the protective tube easily.
The protective tube length can be adjusted as required, which helps to reduce installation labor cost.
[1] Insert the protective tube into "ø4 TUBE" side and find desired cutting point.
[2] While pressing down “A” part, turn the protective tube once.
Oil resistant fibers
・The fiber ber core will not harden or break, even in environments where oil is present.
<Full-protection type>
FT-R60Y (Thru-beam type)
High environmental resistance
The head, nut, and washer are made from rust-resistant SUS304. The unbreakable tough fiber with high durability is covered in a fluorine resin tube. The fiber head is also covered with a fluorine resin component, achieving a high level of environmental resistance.
Less susceptibility to oil adhesion thanks to fluorine resin
Fibers deliver stable detection, since the sensing part is sealed with fluorine resin, which does not allow oil penetration. Additionally, the detection part features a convex design made of fluorine resin, achieving lower friction than glass.
Resistant to oil and coolant
The fiber head and fiber cable are connected by the âfastening and caulkingâ method without using adhesives. This method eliminates concerns that adhesives will absorb moisture in high-humidity environments and damage the fiber. The enclosure achieves IP68G protection, so the fiber can be installed around metal processing machines shrouded in the oil mist.
| Test oil | Product |
|---|---|
| Lubricating oil | Velocite Oil No. 3 |
| Non-water-soluble cutting oil | Yushiron Cut Abas KZ201 |
| Yushiron Cut UH75 | |
| Water-soluble cutting oil | Syntilo 9954 (10% diluted) |
| Yushiroken S50N (2% diluted) | |
| Alcohol-based neutral detergent | Super Teepol |
*Yushiron and Yushiroken are registered trademarks of Yushiro Chemical Industry Co., Ltd.
<Cable-protection type>
FT-R44Y (Thru-beam type) / FD-R61Y (Reflective type)
Even stronger than tough fiber
The tough fiber has been reinforced by covering it with a fluorine resin tube so that it can be used even in harsh environments where oils and solvents are used. The fiber cable will not harden or break, even if it is splashed with oil.
IP67 rating
The head, nut, and washer are made from rust-resistant stainless steel (SUS304).
Applications
Detecting wafer cassette in cleaning tank
Sensing wafer in corrosive environment
Chemical filler
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Order guide
Thru-beam type (one pair set)Reflective type
Thru-beam type (one pair set)
Oil-resistant
| Type | Shape of fiber head (mm) | Model No. | Bending radius (mm) | Fiber cable length | Free-cut | Beam axis dia. (mm) | Protection | Ambient temp. | |
|---|---|---|---|---|---|---|---|---|---|
| Square head type | M4 | Cable-protection type Compatible with lens
|
FT-R44Y | R4 Bending durability | 2m | Available | ø1 | IP67 (Note) | －55 to ＋80 ℃ |
| M6 | Full-protection type
|
FT-R60Y | ø3.5 | IP68G | |||||
Note:The fiber part is oil-resistant.
・Refer to "Digital Fiber Sensor FX-550/FX-550L List of fibers", "Digital Fiber Sensor FX-500 Ver.2 List of fibers" and "Digital Fiber Sensor FX-100 List of fibers" for the sensing range.
・:
Refers to a fiber which possesses both unbreakable (bending radius: R10 mm R0.394 in, reciprocating bending: 180°) and more flexible (bending radius: R4 mm R0.157 in or less) features.
Chemical-resistant
| Type | Shape of fiber head (mm) | Model No. | Bending radius (mm) | Fiber cable length | Free-cut | Beam axis dia. (mm) | Protection | Ambient temp. |
|---|---|---|---|---|---|---|---|---|
| Flat type | Easy mounting • Rectangular head SEMI S2 compliant (Note 3) Metal-free
|
FT-Z802Y | R4 Bending durability (Note 2) | 2m | Available | ø3.7 | IP68G (Note 2) | 0 to ＋60 ℃ |
| Cylindrical type | Heat-resistant 115 ℃ Metal-free
| FT-HL80Y | R30 | 2m (Note 1) | Available | -40 to ＋115 ℃ | ||
| Metal-free
| FT-L80Y | -40 to ＋70 ℃ | ||||||
| Side-view Metal-free
| FT-V80Y | ø2.8 |
Note 1:The allowable cutting range is 500 mm 19.685 in from the end that the amplifier inserted.
Note 2:Specifications have been changed from production at February, 2014.
Note 3:The design takes into account the environmental testing required by SEMI S2.
To ensure that the final system complies with the standards, you must design and use it in accordance with relevant standards, regulations, and regulations.
・Refer to "Digital Fiber Sensor FX-550/FX-550L List of fibers", "Digital Fiber Sensor FX-500 Ver.2 List of fibers" and "Digital Fiber Sensor FX-100 List of fibers" for the sensing range.
・:
Refers to a fiber which possesses both unbreakable (bending radius: R10 mm R0.394 in, reciprocating bending: 180°) and more flexible (bending radius: R4 mm R0.157 in or less) features.
Reflective type
Oil-resistant
| Type | Shape of fiber head (mm) | Model No. | Bending radius (mm) | Fiber cable length | Free-cut | Protection | Ambient temp. | |
|---|---|---|---|---|---|---|---|---|
| Square head type | M6 | Cable-protection type
|
FD-R61Y | R4 Bending durability | 2m | Available | IP67 (Note) | -55 to +80 ℃ |
Note:The fiber part is oil-resistant.
・Refer to "Digital Fiber Sensor FX-550/FX-550L List of fibers", "Digital Fiber Sensor FX-500 Ver.2 List of fibers" and "Digital Fiber Sensor FX-100 List of fibers" for the sensing range.
・:
Refers to a fiber which possesses both unbreakable (bending radius: R10 mm R0.394 in, reciprocating bending: 180°) and more flexible (bending radius: R4 mm R0.157 in or less) features.
Chemical-resistant
| Type | Shape of fiber head (mm) | Model No. | Bending radius (mm) | Fiber cable length | Free-cut | Protection | Ambient temp. |
|---|---|---|---|---|---|---|---|
| Cylindrical type | Metal-free
|
FD-S60Y | Protective tube R30 mm Fiber R4 Bending durability | 2m (Note) | Available | IP68G | -40 to +70 ℃ |
Note:The allowable cutting range is 500 mm 19.685 in from the end that is inserted to the amplifier.
・Refer to "Digital Fiber Sensor FX-550/FX-550L List of fibers", "Digital Fiber Sensor FX-500 Ver.2 List of fibers" and "Digital Fiber Sensor FX-100 List of fibers" for the sensing range.
・:
Refers to a fiber which possesses both unbreakable (bending radius: R10 mm R0.394 in, reciprocating bending: 180°) and more flexible (bending radius: R4 mm R0.157 in or less) features.
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Dimensions
Unit: mm in
Thru-beam type (one pair set)
Reflective type
FD-R61Y
Reflective type
Free-cut
<with FX-AT3>
FD-S60Y
Reflective type
Free-cut
<with FX-AT5>
FT-R44Y
Thru-beam type
Free-cut
<with FX-AT3>
FT-R60Y
Thru-beam type
Free-cut
<with FX-AT3>
FT-HL80Y
Thru-beam type
Free-cut
<with FX-AT3>
FT-L80Y
Thru-beam type
Free-cut
<with FX-AT3>
FT-V80Y
Thru-beam type
Free-cut
<with FX-AT3>
FT-Z802Y
Thru-beam type
Free-cut
<with FX-AT3>
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