Panasonic Industry / Automation Controls
Panasonic Industry / Automation Controls

LED Type Wafer Alignment Sensor Controller HD-T1

  • Basic Information

  • Applications

  • Order guide

  • Specifications

  • Dimensions

  • Circuit/ Wiring

  • Cautions For Use

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Basic Information

The use of a safe LED light beam now allows for high precision detection with a resolution of 30 μm 1.181 mil

CE,UKCA Approved

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Applications

Detecting wafer eccentricities or notches

Detecting wafer eccentricities or notches

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Order guide

Sensor head

AppearanceSensing rangeSensing widthModel No.

30 mm 1.181 in (fixed)
(Note)
30 mm 1.181 inHD-T1030

Note :

The value is in a state that the sensor is mounted on the mounting base at the time of factory shipment.

Controller

Make sure to use the sensor head and the controller together as a set.

AppearanceModel No.Output

HD-T1CAnalog voltage
・Output voltage: 1 to 5 V

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Specifications

Sensor head

Model No.HD-T1030
Applicable controllerHD-T1C
Sensing width30 mm 1.181 in (Linearity is specified at 28 mm 1.102 in width.)
Sensing range30 mm 1.181 in (fixed) (Note 2)
Pollution degree3 (Industrial environment)
Ambient temperature0 to +40 ℃ +32 to +104 ℉ (No dew condensation),
Storage: -20 to +55 ℃ -4 to +131 ℉
Ambient humidity35 to 85 % RH, Storage: 35 to 85 % RH
Ambient illuminanceIncandescent light: 3,000 lx or less at the light-receiving face,
Fluorescent light: 3,000 lx or less at the light-receiving face
Voltage withstandability1,000 V AC for one min. between all supply terminals connected together and enclosure
Insulation resistance20 MΩ, or more, with 250 V DC megger between all supply terminals connected together and enclosure
Vibration resistance10 to 150 Hz frequency, 0.75 mm 0.030 in double amplitude in X, Y and Z directions for two hours each
Shock resistance490 m/s2 acceleration (50 G approx.) in X, Y and Z directions three times each
Emitting elementRed LED (Peak emission wavelength: 650 nm 0.026 mil)
Receiving elementPhotodiode
MaterialEnclosure: PEI, Front cover: Glass, Mounting base: Aluminum
CableHeat-resistant PVC cable, 0.5 m 1.640 ft long, with a connector at the end
WeightNet weight: 150 g approx.

Note 1:Where measurement conditions have not been specified precisely, the conditions used were an ambient temperature of +20 ℃ +68 ℉.

Note 2:The value is in a state that the sensor is mounted on the mounting base at the time of factory shipment.

Controller

Model No.HD-T1C
Applicable sensor headHD-T1030
Supply voltage24 V DC ± 10 % Ripple P-P 10 % or less
Current consumption70 mA or less (Including sensor head)
Analog outputAnalog voltage
- Output voltage: 1 ± 0.5 V (all light interrupted) to 5 ± 0.5 V (all light received)
- Output impedance: 75 Ω
 Response time0.5 ms or less (8 V/ms or more)
Resolution30 μm 1.181 mil (Note 2)
Linearity±1.0 % F.S. (at 28 mm 1.102 in sensing width of the sensing center) (Note 3)
Temperature characteristics±0.1 % F.S./℃ (at 24 ± 2 ℃ 75.2 ± 35.6 ℉) (Note 3)
Span adjustment functionSpan of the analog output voltage is adjusted. 15-turn endless adjuster
Shift adjustment functionOffset of the analog output voltage is adjusted. 15-turn endless adjuster
Warming-up period30 min. or more
Environmental resistancePollution degree3 (Industrial environment)
Ambient temperature0 to +40 ℃ +32 to +104 ℉ (No dew condensation),
Storage: -20 to +70 ℃ -4 to +158 ℉
Ambient humidity35 to 85 % RH, Storage: 35 to 85 % RH
Voltage withstandability1,000 V AC for one min. between all supply terminals connected together and enclosure
Insulation resistance20 MΩ, or more, with 250 V DC megger between all supply terminals connected together and enclosure
Vibration resistance10 to 150 Hz frequency, 0.75 mm 0.030 in double amplitude in X, Y and Z directions for two hours each
Shock resistance490 m/s2 acceleration (50 G approx.) in X, Y and Z directions three times each
MaterialEnclosure: Heat-resistant ABS, Connector cover: Heat-resistant ABS, Adjuster cover: Polycarbonate
Cable0.22 mm2 3-core heat-resistant PVC cable, 0.3 m 0.984 ft long
Cable extensionExtension up to total 3 m 9.843 ft is possible with 0.3 mm2, or more, heat-resistant PVC cable.
WeightNet weight: 85 g approx.

Note 1:Where measurement conditions have not been specified precisely, the conditions used were an ambient temperature of +20 ℃ +68 ℉.

Note 2:Resolution refers to the peak to peak distance conversion value of analog output (in the frequency band below 20 MHz).

Note 3:This is the representative example of measurement with a combination of sensor head and controller.

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Dimensions

  • Unit: mm in

HD-T1030

Sensor head

HD-T1030

HD-T1C

Controller

HD-T1C

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I/O Circuit and Wiring diagrams

I/O circuit diagram

I/O circuit diagram

Note:Analog output does not incorporate a short-circuit protection circuit.Do not connect it directly to a power supply or a capacity load.

Symbols・・・

D:Reverse supply polarity protection diode
ZD:Surge absorption zener diode

Terminal arrangement

Terminal arrangement

Terminal No.Description
1+VEmitter side
20V
3Emission pulse
4Shield
5ShieldReceiver side
6Light received signal
70V
8+V

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Cautions For Use

  • Never use this product as a sensing device for personnel protection.
  • In case of using sensing devices for personnel protection, use products which meet laws and standards, such as OSHA, ANSI or IEC etc., for personnel protection applicable in each region or country.

・Make sure to use the sensor head and the controller together as a set.

Mounting

  • Mount the sensor head using 2 pcs. M4 hexagon-sockethead bolts (purchase separately) with a tightening torque of 0.5 N·m or less.
  • Do not remove the screws fixing the emitter / receiver and the mounting base. If removed, the output value will change.
  • Do not fix with the screws, using the mounting hole on the side of emitter / receiver.

Sensor head

Controller
<In case of using DIN rail>

[1]Fit the front part of the mounting section of the unit on the 35 mm 1.378 in width DIN rail, pressing the stopper towards the arrow (the stopper is locked) shown in the right figure.

[2]Press down the rear part of the mounting section of the unit on the 35 mm 1.378 in width DIN rail to fit it.

 

In case of using DIN rail

* For removal, insert a flat-bladed screwdriver into the groove of the stopper and pull the handle backwards.

<In case of using screws>

  • Mount using M4 pan head screws with a tightening torque of 1.2 N·m or less.

In case of using screws

Wiring

  • Analog output of controller does not incorporate a shortcircuit protection circuit. Do not connect it directly to a power supply or a capacity load.
  • Care should be taken that static electricity is not applied to the connector during wiring. It may damage the product.
  • Take care that wrong wiring will damage the product.
  • Cable extension is possible up to total 3 m 9.843 ft with 0.3 mm2, or more, cable. Note that the cable length of the sensor head cannot be changed.
  • Do not apply stress such as forced bending and pulling to the cable joint.
  • Make sure to use an isolation transformer for the DC power supply. If an autotransformer (single winding transformer) is used, this product or the power supply may get damaged.
  • In case a surge is generated in the used power supply, connect a surge absorber to the supply and absorb the surge.

Others

  • Do not use during the initial transient time (0.5 sec. approx.) after the power supply is switched on.
  • This product outputs according to the amount of LED light received. Optical power varies between the center and the periphery of sensing range, and note that dimensional accuracy cannot be assured.
  • Do not allow any water, oil, fingerprints, etc., which may refract light, or dust, dirt, etc., which may block light, to stick to the emitting / receiving surfaces of the sensor head. In case they are present, wipe them with a clean, dust-free soft cloth or lens paper.
  • If the sensing object is specular or transparent object, note that accurate measurement may not be possible.

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